Chemical Solution Deposition of BaSrTiO3 Films

        We compared three chemical solution deposition routes to BaxSr1-xTiO3 composed of barium and strontium acetate, titanium diisopropoxide bis (acetylacetonate), dissolved in a mixture of acetic acid, water and isoproponal resulted in films with spin defects, pinholes, poor crystallization, and poor electrical properties. FTIR spectra revealed a less facile decomposition pathway as indicated by the higher thermal budget required to decompose TIP(acac), a reduced hydroxy component and increased free Co2 in the BST films spun from ACETATE solutions. A hybrid route utilizing acetic acid modified barium, strontium and titanium isopropixides resulted in films with better crystallinity and a reduced carbonate content in the FTIR spectra. The best BST films were obtained from a sol gel route utilizing barium, strontium, and titanium 2-methoxyethoxides. The films had minimal carbonate content in the FTIR spectra, crystallized at 700degreesC, and had dielectric constants up to 400 with leakage currents less than 10-7 A/cm2.

By: Deborah A. Neumayer, Peter Duncombe, Robert Laibowitz and Alfred Grill

Published in: RC20738 in 1997

This Research Report is not available electronically. Please request a copy from the contact listed below. IBM employees should contact ITIRC for a copy.

Questions about this service can be mailed to .