Merits of Cellwise Model-Based OPC

One of the most compute intensive dataprep operations for 90nm PC
level is the model-based optical proximity correction (MBOPC). The
running time and output data size are growing unacceptably,
particularly for ASICs and designs containing large macros built out
of library cells (books). The reason for this growth is that the
region-of-interest for MBOPC is approximately 600nm, which means that
most library cells "see" interactions with adjacent books in the same
row and also in adjacent rows.

In this paper, we investigate the merits of doing cellwise MBOPC.  In
its simplest form, the approach is to perform dataprep for each cell
once per cell definition rather than once per placement.  By
inspection, this will reduce the computation time and output data size
by a factor of P/D, where P is the number of book placements (100s to
millions) and D is the number of book definitions.

Our preliminary finding indicates that there is negligible difference
between nominal CD for cellwise corrected cells and chipwise corrected
cells.  We will present our finding in terms of average CD and contact
coverage, as well as runtime reduction.

By: Puneet Gupta, Fook-Luen Heng, Mark Lavin

Published in: RC23107 in 2004


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