Thermodynamics and kinetics of room-temperature grain growth in Cu films

Copyright © (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

We studied the energetics and kinetics of grain growth in Cu lms, by estimating the magnitude of various possible driving forces for microstructural change that can be present in the as-deposited film. A driving force of at least 100 J/cm is required to account for the speed at which the grain boundaries move at room temperature. This value cannot be accounted for by only considering the minimization of grain boundary energy and possible effects related to surface and strain energy as the main driving mechanisms. It is suggested that the additional driving force which is needed to explain the speed at which the grains recrystallize, is originating from a high density of defects within the as-deposited grains.

By: Christophe Detavernier, Stephen M. Rossnagel, I. Cevdet Noyan, Supratik Guha, Cyril Cabral Jr, Christian Lavoie

Published in: Journal of Applied Physics, volume 94, (no 5), pages 2874-81 in 2003


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