Performance Characteristic of a Thermo-electric Topography Sensor

Micro-fabricated silicon cantilevers with integrated heating elements could be used for topography sensing. In this research report we present the sensitivity, bandwidth and resolution of one of these sensors.

By: Abu Sebastian; Dorothea W. Wiesmann; Christoph Hagleitner; Evangelos S. Eleftheriou

Published in: RZ3696 in 2007


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