Semiconductor Characterization with the Scanning Surface Harmonic Microscope

Copyright © (1994) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

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By: J. P. Bourgoin (CEA/SCM, France), M. B. Johnson, B. Michel

Published in: Applied Physics Letters, volume 65, (no 16), pages 2045-47 in 1994

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